The 75th JSAP Autumn Meeting, 2014

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Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

5:30 PM - 5:45 PM

[17p-A19-12] Closing Remark

○Takashi Noguchi1 (Univ. Ryukyus1)

Keywords:シリコン膜,結晶化,絶縁基板上