The 75th JSAP Autumn Meeting, 2014

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Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

1:30 PM - 2:00 PM

[17p-A19-2] Low Temperature Crystallization using BLDA for Device Applications

○Takashi Noguchi1, Tatsuya Okada2 (Univ. Eyukyus,1, Univ. Eyukyus,2)

Keywords:Laser Annealing,Si film,TFT