The 75th JSAP Autumn Meeting, 2014

Presentation information

Symposium

Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

2:00 PM - 2:30 PM

[17p-A19-3] Atmospheric Pressure Plasma Crystallization and Single-crystalline Layer Transfer for High-performance Thin-Film Transistor Fabrication on Glass and Plastics

Seiichiro Higashi1,2, Shohei Hayashi1, Seiji Morisaki1, Muneki Akazawa1, Kouhei Sakaike1 (Grad. School Adv. Sci. Matter, Hiroshima Univ.1, Research Inst. Nanodevice Bio Systems, Hiroshima Univ.2)

Keywords:結晶化,TFT,プラズマ