[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-4] Low-Temperature Crystallization of Amorphous Si_XGe_1-X Film by Soft X-Ray Irradiation

^○Matsuo Naoto¹, Heya Akira¹, Itoh Kazuhiro², Takahashi Makoto², Kanda Kazuhiro³, Mochizuki Takayasu³, Miyamoto Shuji³ (Graduate school, Univ. Hyogo¹, Joining and Welding Res.Inst. Osaka Univ.², LASTI, Univ.Hyogo³)

Keywords:軟X線,SiGe,低温結晶化