The 75th JSAP Autumn Meeting, 2014

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Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

3:00 PM - 3:15 PM

[17p-A19-5] Internal Stress of Low Temperature Polycrystalline Si Film on Polycarbonate Substrate

○Naoya Kawamoto1, Kazuyuki Tadatomo1, Akira Heya2, Naoto Matsuo2 (Yamaguchi Univ.1, Univ. of Hyogo2)

Keywords:多結晶シリコン