The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Symposium

Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

3:30 PM - 4:00 PM

[17p-A19-6] Demonstration of poly-Ge growth by flash lamp annealing and the MOSFET operation

○Koji Usuda1, Yoshiki Kamata1, Yuuichi Kamimuta1, Takahiro Mori1, Masahiro Koike1, Tsutomu Tezuka1 (AIST-GNC1)

Keywords:Ge,多結晶,MOSFET