The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.5 Surface physics and vacuum

[17p-A6-1~8] 6.5 Surface physics and vacuum

Wed. Sep 17, 2014 1:30 PM - 3:45 PM A6 (E205)

1:45 PM - 2:00 PM

[17p-A6-2] Surface structure analysis of α-Ga2O3 film grown on α-Al2O3 by mist CVD using CAICISS

○Daiki Tamba1, Shun Osaka1, Shouta Okasaka1, Masaya Oda2,3, Hiroshi Tabata1, Osamu Kubo1, Shizuo Fujita2, Mitsuhiro Katayama1 (Osaka Univ.1, Kyoto Univ.2, ROCA K. K.3)

Keywords:酸化ガリウム,CAICISS,CVD