[17p-A6-1~8] 6.5 Surface physics and vacuum

[17p-A6-3] Study on the thermal phase transition of Indium Tin oxide thin films on the flexible substrate

^○Yoshihiro Shioaku¹, Takashi Kuchiyama², Kenji Inoue², Hideo Maruyama³, Shunsuke Muto⁴, Shu Seki¹ (Graduate school of engineering, Osaka Univ.¹, KANEKA Corporation², KANEKA Techno Research Corporation³, EcoTopia Science Institute, Nagoya Univ.⁴)

Keywords:ITO,アニール,フレキシブル基板