The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-A8-1~17] 6.2 Carbon-based thin films

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A8 (E207)

5:00 PM - 5:15 PM

[17p-A8-14] Isotope analysis of diamond-surface passivation effect of H2O-grown ALD-Al2O3 films

○Atsushi Hiraiwa1, Tatsuya Saito2, Akira Daicho2, Hiroshi Kawarada2 (Waseda Univ., INN1, Waseda Univ., Fac. Sci. Eng.2)

Keywords:原子層堆積,酸化アルミニウム,不純物