The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-A8-1~17] 6.2 Carbon-based thin films

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A8 (E207)

5:30 PM - 5:45 PM

△ [17p-A8-16] Ohmic contact formation to p-type (111) diamond by post wet annealing

○Takuma Minamiyama1, Daisuke Miyata1, Tatsuma Chonan1, Norio Tokuda1,2,3, Masahiko Ogura2,3, Daisuke Takeuchi2,3, Satoshi Yamasaki2,3, Takao Inokuma1 (Grad. School of Natural Sci. & Tech. Kanazawa Univ.1, AIST2, JST,CREST3)

Keywords:ダイヤモンド,オーミック接触,OH終端