[17p-A8-1~17] 6.2 Carbon-based thin films

[17p-A8-17] Microstructure and electric properties of AlN/diamond (111) heterostructure

^○Masataka Imura¹, Jiangwei Liu¹, Liao Meiyong¹, Yasuo Koide¹, Takao Matsumoto², Naoya Shibata², Yuuichi Ikuhara² (NIMS¹, The Univ. of Tokyo²)

Keywords:ダイヤモンド,窒化アルミニウム