[17p-A8-1~17] 6.2 Carbon-based thin films

[17p-A8-9] Reduction of contact resistance by planarization of n-type diamond surface

^○(P)Tsubasa Matsumoto^1,2,3, Hiroyuki Kawashima^1,2,4, Hiromitsu Kato^1,2, Daisuke Takeuchi^1,2, Satoshi Yamasaki^1,2,4 (AIST¹, CREST², Innovation school³, Univ. of Tsukuba⁴)

Keywords:ダイヤモンド,パワーデバイス,接触抵抗