[17p-C5-1~18] 15.4 III-V-group nitride crystals

[17p-C5-3] Thickness and Growth condition Dependence of Crystallinity in Semipolar (20-21) GaN Films by X-ray Diffraction

^○(M1)Toshiro Uchiyama¹, Shotaro Takeuchi¹, Takuji Arauchi¹, Yasuhiro Hashimoto², Yoshiaki Nakamura¹, Keisuke Yamane², Narihito Okada², Kazuyuki Tadatomo², Akira Sakai¹ (Osaka Univ.¹, Yamaguchi Univ.²)

Keywords:GaN,XRD,半極性