[17p-C5-1~18] 15.4 III-V-group nitride crystals

[17p-C5-4] Synchrotron X-ray crystallinity evaluation of GaN single-crystal wafers grown by Na flux method

^○(M2)Shuhei Fukuda¹, Yoshiyuki Tsusaka¹, Hidekazu Takano¹, Yasushi Kagoshima¹, Soichi Nose², Shingo Takeda², Kazushi Yokoyama², Junji Matsui², Masayuki Imanishi³, Yuma Todoroki³, Mihoko Maruyama³, Mamoru Imade³, Masashi Yoshimura³, Yusuke Mori³ (Univ. of Hyogo¹, Hyogo Synchrotron Radiation Nanotechnology Lab.², Osaka Univ.³)

Keywords:半導体