The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

03. Optics and Photonics » 3.13 Semiconductor optical devices

[17p-C6-1~10] 3.13 Semiconductor optical devices

Wed. Sep 17, 2014 2:00 PM - 4:45 PM C6 (C212)

2:30 PM - 2:45 PM

[17p-C6-3] Spectroscopic Sensitivity of SOI Photodiode with Hole-Array-Type Metal Grating for Oblique Incident Light

Hiroaki Satoh1,2, Shohei Iwata2, Atsushi Ono1,2, Hiroshi Inokawa1,2 (Shizuoka Univ.1, Shizuoka Univ.2)

Keywords:回折格子,SOIフォトダイオード,斜入射光検出