[17p-C6-1~10] 3.13 Semiconductor optical devices

[17p-C6-3] Spectroscopic Sensitivity of SOI Photodiode with Hole-Array-Type Metal Grating for Oblique Incident Light

^○Hiroaki Satoh^1,2, Shohei Iwata², Atsushi Ono^1,2, Hiroshi Inokawa^1,2 (Shizuoka Univ.¹, Shizuoka Univ.²)

Keywords:回折格子,SOIフォトダイオード,斜入射光検出