[17p-C8-1~8] 3.11 Photonic structures and phenomena

[17p-C8-2] Fabrication and optical characterization of germanium photonic crystal nanobeam cavity

^○Michihiro Kuroki¹, Satoshi Kako¹, Satomi Ishida¹, Katsuya Oda^2,3,4, Tatemi Ido^2,3,4, Satoshi Iwamoto¹, Yasuhiko Arakawa^1,4 (IIS/NanoQuine Univ. of Tokyo¹, Hitachi, Ltd.², PETRA³, PECST⁴)

Keywords:フォトニック結晶