[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration

[17p-PA1-5] A Tri-Axis MEMS Accelerometer Using Multi-Layered Metal Structure

^○Takaaki Matsushima¹, Toshifumi Konishi¹, Daisuke Yamane², Hiroshi Toshiyoshi³, Kazuya Masu², Katsuyuki Machida^1,2 (NTT-AT¹, Tokyo Inst. of Tech.², Univ. of Tokyo³)

Keywords:CMOS-MEMS,加速度センサ,積層メタル構造