[17p-S8-1~13] 3.8 Optical measurement technology and devices

△ [17p-S8-3] Analysis of Surface Strain of Largely Bending Films by Means of Soft Gratings

^○Norihisa Akamatsu¹, Wataru Tashiro¹, Shigenori Fujikawa², Junichi Takeya³, Atsushi Shishido¹ (Tokyo Tech¹, Kyushu Univ.², Univ. Tokyo³)

Keywords:表面歪み,フレキシブルフィルム,回折格子