[18a-A12-1~9] Nanocarbon Technology

△ [18a-A12-7] Amorphous ZnO_xN_y Thin Films with Mobilities Exceeding 200 cm²V^-1s^-1

^○Takanori Yamazaki¹, Yasushi Hirose^1,2,3, Shoichiro Nakao^2,3, Isao Harayama⁴, Daiichiro Sekiba⁴, Tetsuya Hasegawa^1,2,3 (Univ. of Tokyo¹, KAST², JST-CREST³, Tsukuba Univ.⁴)

Keywords:移動度,非晶質,半導体