The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18a-A12-1~9] Nanocarbon Technology

Thu. Sep 18, 2014 9:15 AM - 11:45 AM A12 (E301)

11:15 AM - 11:30 AM

[18a-A12-8] Crystallization of amorphous IZO, IGO and IGZO thin films (1):Crystallization of amorphous IZO and IGO films

Junjun Jia1, Aya Hayase1, Kyousuke Yoshida1, Shinichi Nakamura1, Yuzo Shigesato1 (Aoyamagakuin Univ.1)

Keywords:In2O3-ZnO,In2O3-Ga2O3,Crystallization