The 75th JSAP Autumn Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18a-A12-1~9] Nanocarbon Technology

Thu. Sep 18, 2014 9:15 AM - 11:45 AM A12 (E301)

11:30 AM - 11:45 AM

△ [18a-A12-9] Crystallization of amorphous IZO,IGO and IGZO thin films(2):Crystallization and device property of IGZO

○Ayaka Suko1, Junjun Jia1, Shinichi Nakamura1, Emi Kawashima2, Futoshi Utsuno2, Koki Yano2, Yuzo Shigesato1 (Aoyamagakuin Univ.1, Idemitsu Kosan Co.,Ltd.2)

Keywords:結晶化,IGZO