Crystallization of amorphous IZO, IGO and IGZO thin films (1)：Crystallization of amorphous IZO and IGO films

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Thu. Sep 18, 2014 9:15 AM - 11:45 AM A12 (E301)

11:15 AM - 11:30 AM

^○Junjun Jia¹, Aya Hayase¹, Kyousuke Yoshida¹, Shinichi Nakamura¹, Yuzo Shigesato¹ (Aoyamagakuin Univ.¹)

Keywords:In2O3-ZnO,In2O3-Ga2O3,Crystallization