The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si-English Session

[18a-A15-1~7] 13.5 Si-English Session

Thu. Sep 18, 2014 10:30 AM - 12:15 PM A15 (E306)

11:45 AM - 12:00 PM

▲ [18a-A15-6] Dependence of dielectric constants, leakage currents, and ferroelectric hystereses on Hf0.5Zr0.5O2 thicknesses in MIM Capacitors

○Shinji Migita1, Hiroyuki Ota1, Yukinori Morita1, Meishoku Masahara1 (AIST1)

Keywords:ferroelectricity,capacitor,hafnium oxide