[18a-A15-1~7] 13.5 Si-English Session

▲ [18a-A15-6] Dependence of dielectric constants, leakage currents, and ferroelectric hystereses on Hf_0.5Zr_0.5O₂ thicknesses in MIM Capacitors

^○Shinji Migita¹, Hiroyuki Ota¹, Yukinori Morita¹, Meishoku Masahara¹ (AIST¹)

キーワード：ferroelectricity,capacitor,hafnium oxide