[18a-A16-1~11] 13.4 Devices/Integration Technologies

[18a-A16-1] Systematic Statistical Analysis of Characteristics Variability in Fully Depleted Silicon-on-Thin-BOX (SOTB) MOSFETs and Bulk MOSFETs

^○(M1)Katsuhisa Tanaka¹, Tomoko Mizutani¹, Yoshiki Yamamoto², Hideki Makiyama², Tomohiro Yamashita², Hidekazu Oda², Shiro Kamohara², Nobuyuki Sugii², Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (IIS, Univ. of Tokyo¹, LEAP²)

Keywords:SOI,ばらつき