The 75th JSAP Autumn Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

[18a-A16-1~11] 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 9:00 AM - 12:00 PM A16 (E307)

11:45 AM - 12:00 PM

[18a-A16-11] Observation of Individual Trap by means of Thermally Stimulated Voltage Shift

○Yoshiki Yonamoto1 (Hitachi, Ltd., YRL1)

Keywords:Individual trap,Thermally stimulate