[18a-A16-1~11] 13.4 Devices/Integration Technologies

[18a-A16-8] Comparison of Statistical Distribution of Random Telegraph Noise (RTN) in Bulk and SOTB MOSFETs

^○Yuki Komine¹, Tomoko Mizutani¹, Yoshiki Yamamoto², Hideki Makiyama², Tomohiro Yamashita², Hidekazu Oda², Shiro Kamohara², Nobuyuki Sugii², Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (IIS, Univ. of Tokyo¹, LEAP²)

Keywords:RTN,SOI,ばらつき