[18a-A17-1~13] 15.6 IV-group-based compounds

[18a-A17-13] Study on light irradiation effect in the anodic process of SiC

^○(M1)Kimitaka Hidaka¹, Kazuki Watari¹, Motoaki Iwaya¹, Satoshi Kamiyama¹, Isamu Akasaki^1,2 (Meijo Univ.¹, Akasaki Research Center Nagoya Univ.²)

Keywords:ポーラス,SiC,陽極酸化