[18a-A19-1~13] 13.3 Si Process・Interconnect・MEMS・Integration

[18a-A19-2] \delta doping of Bi in Si crystal with use of Bi nanoline as a dopant source: Elucidation of doping mechanism by using EXAFS

K. Murata^1,2, K. Nitta³, T. Uruga³, Y. Terada³, K. Nittoh¹, O. Sakata¹, ^○K. Miki^1,2 (NIMS¹, Univ. of Tsukuba², JASRI³)

Keywords:ドーピング,ナノ構造,シリコン