10:15 AM - 10:30 AM
[18a-A22-6] Evaluation of interface states between SiN and AlGaN by X-ray photoelectron spectroscopy under bias voltages
Keywords:XPS,AlGaN,界面準位
Oral presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology
Thu. Sep 18, 2014 9:00 AM - 12:15 PM A22 (E314)
10:15 AM - 10:30 AM
Keywords:XPS,AlGaN,界面準位