The 75th JSAP Autumn Meeting, 2014

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Oral presentation

02. Ionizing Radiation » 2.3 Application of radiation, radiation generators and technologies

[18a-B2-1~14] 2.3 Application of radiation, radiation generators and technologies

Thu. Sep 18, 2014 9:00 AM - 12:45 PM B2 (Seminar2)

9:15 AM - 9:30 AM

[18a-B2-2] Development of 3D Micromachining Technique Using Proton Microbeam and Range Shifters

○Takuro Sakai1, Ryo Yasuda1, Hiroshi Iikura1, Masashi Koka2, Takahiro Satoh2, Yasuyuki Ishii2 (JAEA QuBS1, JAEA TARRI2)

Keywords:微細加工,range shifter,PBW