[18a-S1-1~4] 8. Plasma Electronics

[18a-S1-1] [Plasma Electronics Award Speech]（30min.）
Growth Mechanism of Graphene Nanoribbon under Plasma CVD

^○Toshiaki Kato¹, Hiroo Suzuki¹, Rikizo Hatakeyama¹, Toshiro Kaneko¹ (Dept. of Electronic Eng., Tohoku Univ.¹)

Keywords:グラフェンナノリボン,プラズマCVD,合成機構