The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[18p-A11-1~17] 6.4 New thin-film materials

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A11 (E215)

5:00 PM - 5:15 PM

[18p-A11-13] Synthesis and resistivity of Nb-doped TiO2 films by atmospheric chemical vapor deposition technique

○(M2)Nozomi Kobayashi1, Tsuyoshi Kikuta1, Keiji Komatsu1, Shigeo Ohshio1, Ikumi Toda1, Hidetoshi Saitoh1 (Nagaoka Univ. Tech.1)

Keywords:大気開放型CVD法,Nb添加TiO2,導電体