The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[18p-A11-1~17] 6.4 New thin-film materials

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A11 (E215)

5:15 PM - 5:30 PM

[18p-A11-14] SnO2 thin films prepared by coplanar type surface discharge technique

○Syota Kanezashi1, Yuki Masuda1, Toshimichi Hanai1, Masato Tan1, Masayuki Okuya1 (Shizuoka Univ.1)

Keywords:沿面放電,プラズマ