[18p-A11-1~17] 6.4 New thin-film materials

[18p-A11-17] Development of a patterning method for solution-process oxide-gel by UV irradiation

^○Yuuki Yoshimoto¹, Koji Nagahara¹, Tatsuya Shimoda^1,2,3 (JAIST¹, JST-ERATO², GDRC³)

Keywords:液相プロセス,UV照射,パターニング