The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[18p-A11-1~17] 6.4 New thin-film materials

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A11 (E215)

6:00 PM - 6:15 PM

[18p-A11-17] Development of a patterning method for solution-process oxide-gel by UV irradiation

Yuuki Yoshimoto1, Koji Nagahara1, Tatsuya Shimoda1,2,3 (JAIST1, JST-ERATO2, GDRC3)

Keywords:液相プロセス,UV照射,パターニング