Preparation of a single-phase TaO<sub>2</sub> thin film

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A11 (E215)

3:00 PM - 3:15 PM

^○Yuji Muraoka¹, Yuki Fujimoto¹, Takanori Wakita¹, Takayoshi Yokoya¹ (Okayama Univ.¹)

Keywords:薄膜