[18p-A11-1~17] 6.4 薄膜新材料

▲ [18p-A11-7] Preparation of a single-phase TaO₂ thin film

^○Yuji Muraoka，Yuki Fujimoto，Takanori Wakita，Takayoshi Yokoya (Okayama Univ.)

キーワード：薄膜