Silicon incorporated metal oxide thin film transistors (SiM-OxTFT)

Nobuhiko Mitoma

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18p-A12-1~16] Nanocarbon Technology

Thu. Sep 18, 2014 1:15 PM - 5:30 PM A12 (E301)

5:15 PM - 5:30 PM

△ [18p-A12-16] Silicon incorporated metal oxide thin film transistors (SiM-OxTFT)

^○(PC)Nobuhiko Mitoma¹, Shinya Aikawa¹, Xu Gao¹, Takio Kizu¹, Maki Shimizu¹, Meng-Fang Lin¹, Toshihide Nabatame¹, Kazuhito Tsukagoshi¹ (NIMS WPI-MANA¹)

Keywords:SiM-Ox,InSiO,oxide TFT

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