Dependence of crystallinity of IGZO thin films on deposition conditions

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Thu. Sep 18, 2014 1:15 PM - 5:30 PM A12 (E301)

1:45 PM - 2:00 PM

^○Yoshinori Yamada¹, Akihisa Shimomura¹, Yusuke Nonaka¹, Noritaka Ishihara¹, Shunpei Yamazaki¹ (SEL¹)

Keywords:IGZO