Improvement of uniformity of IGZO TFT characteristics for large sputtering cathode

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Thu. Sep 18, 2014 1:15 PM - 5:30 PM A12 (E301)

2:45 PM - 3:00 PM

^○Tatsunori Isobe¹, Makoto Arai¹, Junya Kiyota¹, Kazuya Saito¹ (ULVAC,Inc.¹)

Keywords:IGZO,スパッタカソード