5:00 PM - 5:15 PM
[18p-A14-14] Development of TOF-ERDA with TEA for ultra shallow atom profiling (II)
Keywords:弾性反跳粒子検出法,飛行時間計測,中エネルギーイオン散乱
Presentation information
Oral presentation
07. Beam Technology and Nanofabrication » 7.6 Ion beams
[18p-A14-1~18] 7.6 Ion beams
Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)