The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

5:00 PM - 5:15 PM

[18p-A14-14] Development of TOF-ERDA with TEA for ultra shallow atom profiling (II)

Satoshi Abo1, Pei Ri1, Xin Yuan Yao1, Fujio Wakaya1, Mikio Takai1 (Osaka Univ.1)

Keywords:弾性反跳粒子検出法,飛行時間計測,中エネルギーイオン散乱