The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

5:15 PM - 5:30 PM

[18p-A14-15] Thin film Deposition by Ionic Liquid EMIM-N(CN)2 Ion Beams

○Yuki Hoshide1, Mitsuaki Takeuchi1, Miromichi Ryuto1, Gikan Takaoka1 (Photonics and Electronics Science and Engineering Center, Kyoto Univ.1)

Keywords:イオン液体