The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

5:30 PM - 5:45 PM

[18p-A14-16] Polarity inversion of c-axis normal oriented ScAlN films by ion beam irradiation

○(DC)Masashi Suzuki1, Takahiko Yanagitani1 (Nagoya Inst. Tech.1)

Keywords:極性制御,圧電薄膜共振子,窒化アルミニウム