The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

2:15 PM - 2:30 PM

[18p-A14-5] Velocity control of ClF3 neutral cluster with He carrier gas

○Toshio Seki1, Yu Yoshino2, Takehiko Senoo2, Kunihiko Koike2, Kazuhiro Karahashi3, Takaaki Aoki1, Jiro Matsuo1 (Kyoto Univ.1, Iwatani Corp.2, Osaka Univ.3)

Keywords:クラスター