[18p-A16-1~14] 13.4 デバイス／集積化技術

▼ [18p-A16-11] Effects of thinning condensation UTB GOI films by additional thermal oxidation on GOI Characteristics

^○金佑彊^1,2，高木信一^1,2，竹中充^1,2 (東大院工¹，JST-CREST²)

キーワード：Ge Condensation,UTB GOI MOSFET