Experimental Study on 2D-Si Layers for Future Several-nm CMOS(Ⅷ)

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 1:30 PM - 5:15 PM A16 (E307)

3:30 PM - 3:45 PM

^○Yuya Suzuki¹, Yoshiki Nagamine¹, Masahiro Yamanaka¹, Takashi Aoki¹, Tomohisa Mizuno¹, Tatsurou Maeda² (Kanagawadaigaku¹, Sansouken²)

Keywords:Si