Experimental Study on 2D-Si Layers for Future Several-nm CMOS (IX)

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 1:30 PM - 5:15 PM A16 (E307)

3:45 PM - 4:00 PM

tomohisa mizuno¹, takashi aoki¹, yuuya suzuki¹, ^○yoshiki nagamine¹, toshiyuki samezima² (Kanagawa Univ¹, Toukyounoukou Univ²)

Keywords:ドーパントの影響